{
    "abstract": "This paper reviews and compares electrostatically actuated MEMS (micro-electro-mechanical system) arrays for light modulation and light steering in which transmission through the substrate is required. A comprehensive comparison of the technical achievements of micromirror arrays and microshutter arrays is provided. The main focus of this paper is MEMS micromirror arrays for smart glass in building windows and fa\u00e7ades. This technology utilizes millions of miniaturized and actuatable micromirrors on transparent substrates, enabling use with transmissive substrates such as smart windows for personalized daylight steering, energy saving, and heat management in buildings. For the first time, subfield-addressable MEMS micromirror arrays with an area of nearly 1 m",
    "authors": [
        {
            "affiliation": "Nanoscale Glasstec GmbH (NaGt), 34132 Kassel, Germany.",
            "firstname": "Shilby",
            "initials": "S",
            "lastname": "Baby"
        },
        {
            "affiliation": "Nanoscale Glasstec GmbH (NaGt), 34132 Kassel, Germany.",
            "firstname": "Mustaqim Siddi Que",
            "initials": "MSQ",
            "lastname": "Iskhandar"
        },
        {
            "affiliation": "Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Stra\u00dfe 40, 34132 Kassel, Germany.",
            "firstname": "Md Kamrul",
            "initials": "MK",
            "lastname": "Hasan"
        },
        {
            "affiliation": "Nanoscale Glasstec GmbH (NaGt), 34132 Kassel, Germany.",
            "firstname": "Steffen",
            "initials": "S",
            "lastname": "Liebermann"
        },
        {
            "affiliation": "Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Stra\u00dfe 40, 34132 Kassel, Germany.",
            "firstname": "Jiahao",
            "initials": "J",
            "lastname": "Chen"
        },
        {
            "affiliation": "Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Stra\u00dfe 40, 34132 Kassel, Germany.",
            "firstname": "Hasnain",
            "initials": "H",
            "lastname": "Qasim"
        },
        {
            "affiliation": "Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Stra\u00dfe 40, 34132 Kassel, Germany.",
            "firstname": "Shujie",
            "initials": "S",
            "lastname": "Liu"
        },
        {
            "affiliation": "Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Stra\u00dfe 40, 34132 Kassel, Germany.",
            "firstname": "Eslam",
            "initials": "E",
            "lastname": "Farrag"
        },
        {
            "affiliation": "Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Stra\u00dfe 40, 34132 Kassel, Germany.",
            "firstname": "Dennis",
            "initials": "D",
            "lastname": "L\u00f6ber"
        },
        {
            "affiliation": "Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Stra\u00dfe 40, 34132 Kassel, Germany.",
            "firstname": "Naureen",
            "initials": "N",
            "lastname": "Ahmed"
        },
        {
            "affiliation": "Nanoscale Glasstec GmbH (NaGt), 34132 Kassel, Germany.",
            "firstname": "Guilin",
            "initials": "G",
            "lastname": "Xu"
        },
        {
            "affiliation": "Nanoscale Glasstec GmbH (NaGt), 34132 Kassel, Germany.\nInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Stra\u00dfe 40, 34132 Kassel, Germany.",
            "firstname": "Hartmut",
            "initials": "H",
            "lastname": "Hillmer"
        }
    ],
    "conclusions": null,
    "copyrights": null,
    "doi": "10.3390/mi16010103\n10.1007/s00542-002-0244-0\n10.1016/j.sna.2004.06.022\n10.1109/35.989763\n10.1109/JMEMS.2007.892900\n10.1109/MEMSYS.2002.984329\n10.1109/JLT.2006.886405\n10.3390/mi6111450\n10.3788/COL20100812.1163\n10.1002/andp.201500111\n10.1117/1.JMM.18.4.040901\n10.1117/1.JOM.1.1.014502\n10.1088/0960-1317/23/5/055009\n10.3390/photonics11030253\n10.1088/0960-1317/20/7/075030\n10.1109/LPT.2016.2514299\n10.1364/OE.405142\n10.1016/j.enbuild.2004.09.010\n10.1088/2631-8695/aba4b8\n10.1007/s00024-005-2683-x\n10.3390/en13113020\n10.1177/1477153515577851\n10.1177/1365782807077193\n10.1016/j.buildenv.2016.09.002\n10.4028/www.scientific.net/MSF.1008.72\n10.7771/2159-6670.1068\n10.3390/app13021118\n10.1016/j.techsoc.2011.12.001\n10.1109/JPROC.2002.1002522\n10.1016/j.solmat.2017.01.036\n10.1002/app.27933\n10.1088/0022-3727/27/10/023\n10.1016/j.jclepro.2022.131444\n10.1016/j.energy.2022.124073\n10.1016/j.solmat.2016.05.013\n10.1016/j.solener.2016.02.051\n10.1016/S0013-4686(01)00367-X\n10.1002/j.1538-7305.1985.tb00445.x\n10.1080/19401493.2013.853840\n10.1007/s11082-021-02846-7",
    "journal": "Micromachines",
    "keywords": [
        "closing time",
        "energy saving",
        "light steering",
        "micromirror arrays",
        "planarization",
        "smart window"
    ],
    "methods": null,
    "publication_date": "2025-01-25",
    "pubmed_id": "39858759\n24104129\n33114980",
    "results": null,
    "title": "Advancements in MEMS Micromirror and Microshutter Arrays for Light Transmission Through a Substrate.",
    "xml": "<Element 'PubmedArticle' at 0x788505e42110>"
}